Affiliation of Author(s):微电子与通信工程学院
Journal:APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Co-author:于彦涛,唐明春,陈世勇,刘丹平,欧翔,曾浩
First Author:熊汉
Indexed by:Journal paper
Document Code:139807
Volume:122
Issue:3
Page Number:7
ISSN No.:0947-8396
Translation or Not:no
Date of Publication:2016-01-01