Tao Huang

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LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage
Release time:2021-05-14  Hits:

Affiliation of Author(s): 机械与运载工程学院

Journal: IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS

Key Words: Automation & Control Systems; Engineering, Electrical & Electronic; Instruments & Instrumentation

Co-author: 杨开明(外),朱煜(外),唐倩,程敏,王义

First Author: 黄涛

Indexed by: Journal paper

Document Code: 209436

Volume: 66

Page Number: 8567-8577

ISSN No.: 0278-0046

Translation or Not: no