Tao Huang
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Pole Assignment Control of MIMO Motion Systems With Flexible Structures and Its Application to an Ultraprecision Wafer Stage
Release time:2024-02-28 Hits:
Affiliation of Author(s): 机械与运载工程学院
Journal: IEEE-ASME TRANSACTIONS ON MECHATRONICS
Key Words: Automation & Control Systems; Engineering, Manufacturing; Engineering, Electrical & Electronic; Engineering, Mechanical
Co-author: 杨开明(外),朱煜(外),唐倩,刘飞,王义
First Author: 黄涛
Indexed by: Journal paper
Document Code: 203070
Volume: 23
Page Number: 2273-2284
ISSN No.: 1083-4435
Translation or Not: no