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氮化铝压电薄膜功能器件关键技术
Release time:2021-05-11  Hits:

Affiliation of Participants: 光电工程学院

Granted by: 中国产学研促进会

Grade of Award: Excellence award

Type of Award: 中国产学研合作创新成果奖

Primary Participant: 牟笑静

Co-author: 唐彬(外),黄河(学),徐溢,尚正国,李玮(外),马效星(外),卞振锋(外),张佳佳(外),周鸿(学)